Vacuum UV lamps

Vacuum UV (VUV) lamps are deuterium lamps that are especially designed to supply deep UV light down to a wavelength of 112 nm. The spectral range covers 110 nm to 350 nm with especially high intensity between 120 nm and 160 nm.






They are used for

• HPLC
• high resolution optics (e.g. quality assurance)
• semiconductor exposure
• cleaning of silicon wafer surfaces
• photo-chemical processes with high photon energy
• and many other applications.

Heraeus is specialized on high power VUV lamps with up to 250 W. The D200 lamps come equipped complete with a cooling jacket for easy installation in water cooled operations. Specially designed power supplies are available for use with Heraeus VUV lamps.

Technical data of some standard lamps:

Lamp type	D 200 F	D 200 F-HV			D 200 VUV			F05		J59	V01
Spectral range	160nm - 600nm	160nm - 600nm			112nm - 600nm			112nm - 370nm		112nm - 370nm	112nm-370nm
Power	200 W	200 W			200 W			30W		30W	30W
Cooling	Water	Water			Water			Air		Air	Air
Aperture	1 mm	1 mm			1 mm			1 mm		0.5 mm	1 mm
Total length	140 mm	225 mm			225 mm			75 - 81 mm		75 - 81 mm	146 - 150 mm
Diameter	54 mm at cooling jacket; cooling connector 8 mm	54 mm at cooling jacket; cooling connector 8 mm			54 mm at cooling jacket; cooling connector 8 mm			25 - 26 mm		28.5 - 30.5 mm	37 mm max
Ignition voltage	500 V	500 V			500 V			280 V		300 V	250 V
Guaranteed operating life	1000 h at 0.9 A	1000 h at 0.9 A			300 h at 1.8 A			500 h		500 h	500 h
Remarks		fitted with clamping flange DN 50 KF for connecting to vacuum system						Axial configuration		Side window
Lamp type	V02	V03			V04			V05		HPD2MGF
Spectral range	160nm- 370nm	112nm- 370nm			160nm- 370nm			112nm- 370nm		112nm- 370nm
Power	30W	30W			30W			30W		250W
Cooling	Air	Air			Air			Air		Air
Aperture	1 mm	1 mm			1 mm			1 mm		1 mm
Total length	146 - 150 mm	116 - 120 mm			116 - 120 mm			140 - 144 mm		140 mm
Diameter	37 mm max	37 mm max			37 mm max			37 mm max		80 mm
Ignition voltage	250 V	250 V			250 V			250 V		400 V
Guaranteed operating life	500 h	500 h			500 h			500 h		1000 h
Remarks	Spectrosil window				Spectrosil window					Requires special housing to operate